VACUUM CONTROLLER
   

 

 

  - VSMFC-8002

    MFC ReadoutÀº Process Chamber¿¡ ¼³Ä¡µÇ¾î ÀÖ´Â  

   MFC¿¡ Àü¿øÀ» °ø±ÞÇÏ°í È帣´Â Gas·®À» ¼ýÀڷΠǥ½ÃÇØ

   ÁÖ´Â ÀåÄ¡·Î½á ¿øÇϴ Gas·®À» SettingÇϸç MFC¸¦ Á¦¾î

   ÇÕ´Ï´Ù.

   (µ¿½Ã¿¡ 2°³ÀÇ MFCÁ¦¾î)

   

     ¿¹) 1, 5, 10, 20, 50, 100, 200, 300, 500 sccm

   

     -16bit AD Converter¸¦ »ç¿ëÇÏ¿© MFC Display¿¡ ´ëÇÑ

      Á¤¹Ðµµ¸¦ Çâ»ó ½ÃÄ×½À´Ï´Ù.

     -SMPS (switching mode power supply) TypeÀ¸·Î Àü¾Ð 

      ¾ÈÁ¤¼º ¹× ½Å·Ú¼ºÀ» Çâ»ó ½ÃÄ×½À´Ï´Ù.

 

 

 

 
 

¸Þ´º¾ó

´Ù¿î·Îµå

±¸ Version

2012 Version

 

 

 

SPECIFICATIONS  /  VSMFC – 8002

Number of Measurement Channels

2 (MFC capacity) 

Display for Measured Values

Digital, 7segment LED, 3digits

Unit of Measure

sccm,slm

Panel Cut Size

91 X 91 mm

Input Signal Range

0 ~ 5 VDC

Transducer Output Range 

0 ~ 5 VDC

Power Supply Output Capacity

± 15 VDC @ 800mA

Sensor Cable Length

3 m (Option : 5m, 7m, 10m)

Operating Voltage

AC 110  ~  230V  50/60  Hz

Operating Temperature

10  ~  40 ¡É

 

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  °æ±âµµ È­¼º½Ã µ¿Åº¸é ±Ý°î·Î 193¹ø±æ 9 Aµ¿

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  °æ±âµµ ¾çÁֽà ³²¸é Çö¼®·Î 785¹ø±æ 294

  #294, 785beon-gil, Hyeonseog-ro, Nam-myeon, Yangju-si, Gyeonggi-do

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