Sputter
   

 

 

 

 

 

 

 

 

 

 

 

 

 

- VSMS-25A

   Turbo Pumping SystemÀ» ÀåÂøÇÏ¿© è¹ö¸¦ ½±°Ô °íÁø°ø

   À¸·Î ¸¸µé¼ö ÀÖÀ¸¸ç Magnetron sputtering Gun 3°³¸¦ ÀåÂø

   ÇÏ¿© multi layer¸¦ ½±°Ô ÁõÂø°¡´ÉÇϵµ·Ï ¼³°èµÇ¾ú½À´Ï´Ù.      

   ¶ÇÇÑ reactive gas¸¦ ÀÌ¿ëÇÑ reactive sputtering¸¦ ÇϽǼö

   ÀÖÀ¸¸ç GasÀÇ Á¤¹ÐÁ¶Á¤ °ú RF POWER ¹× DC POWER°¡

   »ç¿ë °¡´ÉÇÏ¿© ¿©·¯°¡Áö ¹Ú¸· ¿¬±¸¿¡ °¡Àå ÀûÇÕÇÑ È¯°æÀ»

   Á¦°øÇÕ´Ï´Ù.

 

 

SPECIFICATIONS (VSMS-25A)

SPUTTER TYPE

Magnetron up type

body by all stainless steel

water jacket type

substrate heater(mould heater)

MAX 600'C (Option 950'C)

rotation motor drive

0~20 RPM

magnetron sputter gun

dia 2"

sliding length

60mm

turbo pump

400 l/sec

direct drive rotary pump

600 L/ MIN

mass flow controller

Ar 100sccm(Option O2, N2)

RF power supply with auto matching network

600w(digital display)

DC power supply

1000W(digital display)

helium leak detection

alcatel detector unit

warranty

12month

 

 

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  °æ±âµµ È­¼º½Ã µ¿Åº¸é ±Ý°î·Î 193¹ø±æ 9 Aµ¿

  #9 A-dong, 390-2, Geumgok-ri, Dongtan-myeon, Hwaseong-si, Gyeonggi-do

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  °æ±âµµ ¾çÁֽà ³²¸é Çö¼®·Î 785¹ø±æ 294

  #294, 785beon-gil, Hyeonseog-ro, Nam-myeon, Yangju-si, Gyeonggi-do

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